Self-organized Nano-cone Arrays in InP/InGaAs/InGaAsP Microstructures by Irradiation with ArF and KrF Excimer Lasers
نویسندگان
چکیده
منابع مشابه
Fabrication of High-Aspect-Ratio Microstructures Using Excimer Lasers
An excimer laser micromachining system is developed to study the process in fabricating high-aspect-ratio microstructures. Specifically, the study experimentally examines process efficiency and the impact of changing major laser operating parameters on the resulting microstructural shapes and morphology. The materials considered in the study include glass, silicon, and aluminum. The ablation or...
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A multiwavelength excitation process using F2 and KrF excimer lasers for the high-efficiency and high-speed refractive index modification of fused silica is demonstrated. This process is essentially superior to conventional single-wavelength F2 laser processing. The former process achieves twice the diffraction efficiency of the latter process at the same number of total photons supplied to the...
متن کاملEffects of KrF „248 nm... excimer laser irradiation on electrical and optical properties of GaN:Mg
The electrical and optical characteristics of GaN:Mg irradiated by a pulsed KrF ~248 nm! excimer laser have been studied. When an as-grown Mg-doped GaN film was irradiated by an excimer laser at an energy density of 590 mJ/cm in a nitrogen atmosphere, the hole concentration was drastically increased up to 4.42310 cm. Furthermore, a GaN:Mg thin film, which was treated by laser irradiation follow...
متن کاملPreparation of periodic surface structures on doped poly(methyl metacrylate) films by irradiation with KrF excimer laser
In this work, we describe laser modification of poly(methyl methacrylate) films doped with Fast Red ITR, followed by dopant exclusion from the bulk polymer. By this procedure, the polymer can be modified under extremely mild conditions. Creation of surface ordered structure was observed already after application of 15 pulses and 12 mJ cm(-2) fluence. Formation of grating begins in the hottest p...
متن کاملAnalysis of photodecomposition of gaseous chlorobenzene by KrF excimer laser.
Gaseous monochlorobenzene was irradiated with KrF excimer laser (248 nm) under reduced pressure. The photodecomposition was an apparent first order reaction. When the system contained no additive gas, the photolysis was found to give benzene (conversion yield: 49%) in the gas phase and many unidentified products in the solid phase. On the other hand, in the presence of oxygen, carbon dioxide (1...
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ژورنال
عنوان ژورنال: Journal of Laser Micro/Nanoengineering
سال: 2012
ISSN: 1880-0688
DOI: 10.2961/jlmn.2012.02.0001